1. 3572-pk sno.28 instruction manual

8/11/2019 1. 3572-PK SNo.28 Instruction Manual

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M3572V00P20060825E

3572-PK

MAP PICKER

INSTRUCTION MANUAL

TESEC Corporation

391-1, Kamikitadai 3-chome,

Higashiyamato, Tokyo 207-0023

JAPAN

Phone (042)566-2111

Fax (042)561-3519


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i

IMPORTANT- Read carefully before proceeding with the operation ofthe equipment.

TESEC License Agreement

(1) The written materials are subject to copyright. No part of this document may be reproduced

or transmitted in any form or by any means for any purpose, without the express written

permission of TESEC.

(2) Information in this document is subject to change without notice.

(3) Every effort has been dedicated to ensure the contents free from any mistakes or faults.

Should any errors to be detected, TESEC appreciates being informed of them.

(4) TESEC is not liable for any damages resulted from accident, abuse, or misapplication of the

equipment, when:

the product has been subjected to adverse operation and/or environmental conditions to those

described in the operation manual.

the product has been subjected to rough handling, negligence, and/or delinquency on the part

of the user's personnel.

the product has become difficult to repair owing to the use of the parts or optional units other

than the TESEC standard without prior authorization of the use by TESEC.

the product has been altered by other personnel than TESEC's authorized service or technical

personnel.

(5) As the licensee, you may physically transfer the software from one computer to another

provided that the software is used on only one computer at a time. You may not electronically

transfer the software from one computer to another over a network. You may not distribute

unauthorized copies of the software or accompanying written materials to others. You may

not modify, adapt, translate, reverse engineer, decompile, disassemble, or create derivative

works based on the software.

(6) TESEC may create, from time to time, updated versions of the software, and notify any person

of such revision or changes.

In no event shall TESEC be liable for any damages whatsoever (including, without limitation,

damages for data program or other intangible assets, damages for loss of business profits,

business interruption, loss of business information, or any other pecuniary loss) arising directly

or indirectly out of the use of or inability to use this software.


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I nt r oduct i on

Succeeding the device-size-independent current model 3271-PK (MAP PICKER), this machine

(3572-PK) has proven its high flexibility to comply with smaller size devices as picker.

It is possible to comply with smaller size devices compared with a Strip Test Handler because the

devices are attached on the wafer ring with dead bug and the devices such as CSP and BGA with its

dicing completed already are adopted.

The machine is composed of an Auto Loader Unit, a Base Machine with a transfer arm and an

Unloader Unit. The auto loader can mount a ring cassette which can be stored 25 wafer sheets.

The un-loader unit is equipped with 1(2) lanes of taping unit / 1 bin (Reject bin). In addition, it

can select the classification by purpose.

The specifications are subject to change without notice.

This instruction manual consists of the following chapters.

Chapter 1 Safety

This chapter describes the safety precautions for the use of the handler.

Chapter 2 Construction and Installation

This chapter describes the construction of the handler and the installation

procedure from the set-up to the power-on.

Chapter 3 Parts and Main Functions

This chapter describes the name and function of each unit of the handler, and

the control panel, etc.

Chapter 4 Operation

This chapter describes how to operate the handler and how to deal with an

alarm situation and an operator call.

Chapter 5 Setting Method and Display

This chapter describes the setting procedures, the functions, and the displays.

Chapter 6 Chapter 6Conversion ProcedureThis chapter describes the procedure of converting

handling devices.

Chapter 7 Specifications

This chapter describes the standard specifications and the performance.

ii


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Chapter 8 Inquiry about Maintenance and Operation

This chapter describes the address of TESEC, and the warranty and service

after shipment.

iii


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iv

Table of Contents

1. Safety ....................................................................................................... 1-1

1.1 Operating Safety ..................................................................................... 1-2

1.2 Definition of Terminology...................................................................... 1-2

1.3 Danger, Warning, Caution Labels........................................................... 1-3

1.4 Cautions in Application .......................................................................... 1-5

2. Construction and Installation......................................................................... 2.1

2.1 Construction of Handler.......................................................................... 2-2

2.2 Unpacking and Installation ..................................................................... 2-4

3. Units and Main Functions.............................................................................. 3-1

3.1 Names of Units ....................................................................................... 3-2

3.2 Functions of Components and Units....................................................... 3-4

3.3 Names and Functions of Components in control site ............................. 3-8

4. Operation ................................................................................................. 4-1

4.1 Preparation for Operation ................................................................. 4-3

4.2 Operating Procedures ........................................................................ 4-7

4.3 Vision Functions ............................................................................... 4-20

4.4 How to Stop Operation .....................................................................4-127

4.5 Monitor Display and How to Recover from Error ................................ 4-129

5. Setting Method and Display ....................................................................5-1

6. Conversion (Option) .................................................................................. 6-1

7. Specifications ...........................................................................................7-1

8. Inquiry about Maintenance and Operation ..............................................8-1


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1-1

Safety

1.1 Operating Safety.................................................................................. 1 2

1.2 Definition of Terminology .................................................................... 1 2

1.3 Danger, Warning, Caution Labels ........................................................ 1 3

1.4 Cautions in Application ........................................................................ 1 5


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1-2

C UTION

D NGER

W RNING

1.1 Operating Safety

Before operating the machine, the user is requested to peruse this operation manual

concerning the machine installation, operation procedures, and safety.

Pay attention to warnings, cautions, and safety precautions as briefed below or as

described in the manual, when operating, maintaining, or repairing the machine, for the

proper operat ion and sa fe ty . Danger , warning, caution, and notice labels stuck on the

machine are for safety of operators.

1.2 Definition of Terminology

In this operation manual, the degree of hazardous condition that may be caused by the

use of controls, adjustments or performance of procedures other than those specified in

the manual is categorized into the following categories.

Indicates an imminently hazardous situation which, if not avoided,

may result in death or serious injury.

Indicates a potentially hazardous situation which, i f not avoided, may

result in shock of electricity or serious injury.

Indicates a potentially hazardous situation which, i f not avoided, may

result in minor or s light injury.

Describes how to operate the machine properly, not causing machine

trouble.

Describes instructions and useful tips for the smooth machine

operation.

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NOTICE


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1-3

1.3 Danger, Warning, Caution Labels

Danger, warning, and caution labels are affixed on the machine for the safety of the

operators and the qualified service/technical personnel. Utmost care is required when

operating the equipment or the parts affixed with the label. Do not attempt to remove

those labels under any circumstances.

Be careful to operate the equipment because its

electrical mechanism includes the parts of high

voltage. Before the maintenance work, be sure to

turn off the power supply of the machine and pull

out the plug from the outlet.

When the space available is small, the following labels are affixed.

Moreover, the following label gives advance notice of warning the possibility of an

electric shock in specific conditions.


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1-4

Do not try to detach any protective covers during

the machine operation, nor start the machine

operation with the protective cover detached or

opened. Keep hands and face away from anymobile parts under the cover.

Keep hands and face away from any mobile parts

under the cover.

To connect an interface cable to the connector

indicated with the left mark, be sure to refer to

instruction manual. Performing connection

without reading the instruction manual may

causes loss in the quality of the machine.

The concrete notice is described in the CAUTION

item in the instruction manual.


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1-5

1.4 Cautions in Application

Power Source

(1) Handler must be grounded for prevention of electric shock. The power cable of

the machine is of 3 or 2 prong plug type with a grounding conductor, of which

surface is green with one or more yellow stripes.

(2) Do not touch conductors with bear hand. When maintaining the machine or

replacing the parts, turn off the power source and disconnect power cables.

Residual high voltage may remain for a while after disconnecting the power cables.

Discharge the residual electricity completely before touching inside of the machine.

(3) Wait at least ninety seconds after turning the power switch from "ON" to "OFF"

and vice versa.

(4) Apply the power source and fuses appropriate to the supply voltage and the rated

current.(5) Turn off the power switch when replacing the fuse. Confirm that the fuse fitting to

the rating and type is to be used.

(6) When connecting or disconnecting the cable of the equipment to the service power

outlet, hold the plug securely.

(7) For energy isolation, the earth leakage breaker is able to be locked in OFF position

with the handle-locking device. For details, refer to the instructions below.


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1-6

C UTION

(8) An uninterruptible power supply (UPS) is installed in the main unit of the personal

computer at the lower portion in the left side of the handler.

Name and type : DC Backup Battery Pack PCPS-RBP-01A

Main Unit of Personal Computer

Main Unit of

Personal Computer

Replacement Procedure

Loosen the lock screws (2 pcs), and draw out

the UPS from the personal computer.

Replace the UPS and assemble the parts in

reverse steps.

Please process the UPS (battery) according to the

predetermined waste disposal method.

When you cannot process, please consult to our

company. When processing is requested to our

company, the expense will be charged separately.

Uninterruptible Power Supply (UPS)


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1-7

Installation and Safe Storage

(1) Install the machine on the level floor having sufficient strength.

(2) Avoid installing the machine at the following place.

* Where the temperature is extremely high or low.

Temperature of operation environment: 25 5C

* Where the humidity is extremely high or low.

Humidity of operation environment: 20 to 60 %

* Dusty place

* Where it is exposed to direct sunlight.

* Near a high voltage power source

* Where an instrument generating intense magnetic fields or electr ic noise is used

nearby.

* Where a lot of noise, impacts, or vibrations are inevitable.

* Where vapor of volatile solvent (medicine or drug) permeate.(3) Avoid disassembling the equipment for the purpose of storage or partial application

of the disassembled equipment

(4) If the electrical parts are damaged, replace it. Damaged parts will cause the other

parts to be damaged.

(5) Before starting the machine operation, check to see that no foreign object is put in

the equipment. Do not put a tool box in the machine when being operated.

(6) Do not detach any protective covers during operation, nor operate the machine with

a protective cover for the mobile parts being detached or opened. Only the

authorized operator must be allowed to detach the protective cover.

(7) Do not put inflammable objects on the machine.

Whenever the machine is cleaned, make sure that on the machine there are no

leftover rags containing volatile solvent.

The machine is manufactured without combustible material.NOTICE


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EMERGENCY OFF Switch

Press the red button to stop the picker in an emergency.

Stopping the handler using the EMERGENCY OFF switch turns off

the power to the handler including the vacuum control mechanism;

the air supply switch remains turned on, though.

After clearing the trouble having necessitated the emergency stop,

conduct safety checks on the inside and outside the handler.

To resume the handler operation, unlock the EMERGENCY OFF

switch by giving it one-quarter rotation in the arrow direction. To

restart the handler operation, turn on the POWER switch (KeySwitch) to boot up the personal computer and to activate the

application software, and then restart the handler by pressing the

START switch.

In case the EMERGENCY OFF switch is pressed, the EMERGENCY

OFF switch remains pressed.

In case where the EMERGENCY OFF switch is pressed, the picker

does not resume operation when the POWER switch turned on.

NOTICE


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1-9

W RNING

INTERLOCK Function

The machine is equipped with the interlock function.

When opening any cover, the interlock function performs and interrupts the motors at

corresponding site.

Use this switch to turn on and off the interlock function.

ENABLE : Interlock function used mode

When the interlock function has performed, close all covers and

press the INTERLOCK RESET switch to re lease the in terlock

function.

Then, press the START switch to restart the handler operation.

During operation, any cover can not be opened as the

covers are locked.

DISABLE : Interlock function not used mode

The background of display screen changes in yellow.

When it is necessary to access the movable parts by

inserting your hands, fingers, or face into inside the picker,

wait until all the movable parts stop completely. After the

picker stops completely, the message of STOP" appears

on the operation screen, and the red lamp of the STOP

switch lights up.

Especially be careful of pressing the START switch.

On pressing the START switch for the first time after

turning ON the power supply of the picker, t he movableparts will perform the following in it ia l opera tions at low

speed (about 20% of high speed).

NOTICE


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1-10

Start the initial operation Move to the initial check

position Move to the waiting position

Then, the picker stops under usual operation.

The following three functions show that the picker is

under initial operation.

The message of initializing in progress appears at upper

right on the operation screen.

All three lamps (green, yellow, red) of the signal tower unit

blink.

Alarm sound is raised.

Make sure that all the movable parts stop completely after the

initial operations.

[Operational Flowchart for Interlock Function]

START

COVER

INERLOCK

RESET SW

START SW

MOTOR POWER ON

Handler START

COVER

MOTOR POWER OFF

ON

OPEN

OFF

CLOSE or MAINTENANCE

(INTERLOCK DISABLE)

ON

OFF

OPEN

CLOSE or MAINTENANCE(INTERLOCK DISABLE)


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1-11

[Applicable Covers and Doors for Interlock Function]

Door L

Door R

Side Cover

Auto Loader

Front Cover


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2-1

Construction

and

Installation

2.1 Construction of Handler ............................................................................ 2-2

2.2 Unpacking and Installation........................................................................ 2-4

2.2.1

Initial Uncrating and Inspection ............................................................ 2-4

2.2.2 Installation ............................................................................................ 2-5


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HANDLER 3572-PK

2. Construction and Installation 2-2 2006063000T

2.1 Basic Configuration of Equipment

Refer to the below General View on this and the next page.

Auto Loader Unit

Unloader Unit

Operation Panel

Main Unit


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2.2 Unpacking and Installation

The unpacking and installation procedures are described below.

2.2.1 Initial Uncrating and Inspection

TESEC packed the following products with utmost care. However, if any

damage or abnormality that has been caused during the transportation is found,

please contact to TESEC immediately.

Main body of the handler with its accessories 1 set

Place the packages on the flat floor to unpack.Attention must be paid to the following.

When lifting up the package by using a forklift truck, fully insert the forks

under the crate so that the package does not tilt.

Place the packages on the flat floor carefully so that any impact or vibration is

not given to the products.

Loosen the fixing screws and remove them to uncrate. Do not pry the crate by

using a crowbar and so on. If a crowbar hits the product, the product may be

damaged.

Some parts such as a safety cover may have been packed separately from the

main body. Be sure to attach these parts when setting up the handler.

The mechanical parts and the movable parts are secured by cushions and/or

strings to avoid impact and vibration during the transportation. Remove the

cushions and the strings to unpack.


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HANDLER 3572-PK


2.2 Unpacking and Installation

The unpacking and installation procedures are described below.

2.2.1 Initial Uncrating and Inspection

TESEC packed the following products with utmost care. However, if anydamage or abnormality that has been caused during the transportation is found,

please contact to TESEC immediately.

Main body of the picker with its accessories 1 set

Unloader unit of the picker 1 set

Place the packages on the flat floor to unpack.

Attention must be paid to the following.

When lifting up the package by using a forklift truck, fully insert the forks

under the crate so that the package does not tilt.

Place the packages on the flat floor carefully so that any impact or vibration is

not given to the products.

Loosen the fixing screws and remove them to uncrate. Do not pry the crate by

using a crowbar and so on. If a crowbar hits the product, the product may be

damaged.

Some parts such as a safety cover may have been packed separately from the

main body. Be sure to attach these parts when setting up the picker.

The mechanical parts and the movable parts are secured by cushions and/or

strings to avoid impact and vibration during the transportation. Remove the

cushions and the strings to unpack.


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2.2.2 Installation

About Power Supply

To prevent a hazard of electric shock, be sure to ground the picker.

The power cable is of 2- or 3-prong plug type with a grounding conductor.The grounding conductor is green with yellow stripes.

Use the specified power voltage. Regarding the specifications of the power supply,

refer to Chapter 6, "Specifications". If the power voltage is not stable, adjust the

voltage by using a voltage regulator.

Hold the main body of the power supply plug to plug and unplug.

Before connecting the power supply cable, be sure to turn off the power switch ofpicker.

About Air

Use clean air which does not include water or oil.

Be sure to use the clean air at the specified pressure. Regarding the specifications of

the air pressure, refer to Chapter 6, "Specifications".

Installation Procedure

(1) Place the picker on the flat floor.

(2) Loosen all the lock nuts to lift up the level adjusters from the floor.

Lock Nut

Level Adjuster

Caster


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HANDLER 3572-PK


(3) Set up the picker at the predetermined position.

Lift down the level adjusters to lift up the caster from the floor, and fasten the all lock

nuts.

(4) Set the unloader unit to the picker in position and firmly secure by locking levers.

(5) Connect the power cable and the communication cables of the unloader unit to the

picker mainframe in position.

(6) Attach the signal tower unit, which is packaged separately from the picker body, to

the picker. Connect the cable to the connector inthe frame.

Signal Tower Unit

Connector


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HANDLER 3572-PK


(7) Set up the peripheral equipment at the predetermined position, and connect the

interface cables to the picker.

For details, refer to the manual of the peripheral equipment.

(8) Connect the power cable and an air supply tube to the picker.

Air Supply Tube


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(9) Connect a ground cable to the ground terminal.

Be sure to ground the picker to prevent a hazard of electric shock.

(10) Turn On the air switch.

Check the pressure gauge. If necessary, adjust the pressure to the specified value by

using the adjustment knob of the regulator installed in the picker.

Power Cable

Grounding Terminal

Pressure GaugeAir Switch Adjusting Knob

Filter RegulatorMist Separator


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HANDLER 3572-PK


(11) After checking that there is no foreign object inside of the picker and power switches

of every apparatus (personal computer, hard disc unit, LED lighting supply etc.) are in

on state, turn on the circuit breaker. Thereafter turn on the POWER switch of the

picker.

The installation work is completed.

To operate the picker, refer to Chapter 4, "Operation".

POWER Switch

Earth Leakage Breaker [Rated Interrupting Capacity 7.5kA]


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3-1

Units and Main Functions

3.1 Name of each Section............................................................................................................................3-2

3.2 Functions of Components and Units..................................................................................................3-4

3.3 Names and Functions of Components in control site......................................................................3-8

3.3.1 Operation Switch .............................................................................................................................3-8

3.3.2 EMERGENCY OFF Switch and POWER Switch.....................................................................3-14

3.3.3 Personal Computer and Peripheral Equipment............................................................................3-16

3.3.4 Front panel of Power Supply Unit................................................................................................3-21

3.3.5 Connector Panel of Power Supply Unit .......................................................................................3-23

3.3.6 Taping Controller Panel.................................................................................................................3-24

3.3.7 Air Switch Panel and Air Line Conditioning Equipment...........................................................3-27

3.3.8 Others..............................................................................................................................................3-29


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3.1 Name of each Section

Refer to the below General View on this and the next page.

Operation Panel

Unloader Unit

Main Unit

Auto Loader Unit

3. Units and Main Functions 3-2 2006063000T


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3.2 Functions of Components and Units

(1) Device Loading Section Devices are supplied by one storing cassette of wafer sheets.

Storing capacity of cassette: 25 wafer sheets

Operator sets one storing cassette of 8 inches wafer sheets at theloading position.

One wafer sheet is withdrawn from the cassette, carried to the loader

table, turned 90 degrees clockwise and transferred to the sorting site.

Then, the succeeding wafer sheet proceeds up to the loader table and

stands by there.

When the sorting of all the devices on the proceeding wafer sheet

completes, the wafer sheet returns to the upper slot of the loader table.

After transferring the succeeding wafer sheet to the sorting site, the

proceeding wafer sheet is turned 90 degrees counterclockwise and

re-stored into the cassette.

Repeats the above consecutive operations to supply devices to the

sorting site. When the wafer sheet is turned 90 degrees clockwise, the

barcode reader reads the barcode marked on the wafer ring.

Barcode Reader


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(2) XY Table XY Table holds the wafer sheet rigidly not to cause position deviation.

Based on the Map File Data given by the picker, XY Table carries out

compensation of X-Y position against the device pick up position.

Also, it is possible to take newly the image data of device leads at each

3 corners of the device plates on the wafer ring using the own visionsystem and manage it as the Map File Data.

(3) Sorting Site In accordance with the sort designation controlled by the Map

System, the picker sorts each device to tray, tube or tape.

When each device is picked up, plural needles (push up pins) push the

device to float and the nozzles of the reverse unit suck the devices one

by one.

The nozzles sucking the devices turn 180 degrees clockwise and

transfer the devices to the sorting arm. The devices sucked on the

nozzles of the sorting arm transferred to the designated position after

carrying out q compensation.

When all the devices on the wafer sheet are sorted completely, the

wafer sheet returns to the loader table site.

Number of Sort Signals :32



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(4) Device Storing Site

(Depending on the specifications, the combination of storing types vary.)

Taping Refer to (5) "Taping".

Bin Storing Stores the devices.

Set the bulk bin on the designated place.

(5) Taping Site Stores device in the embossed cup of the carrier tape, seals the

embossed cups by a sealing tape and winds up the on a reel.

The empty embossed cup is detected by sensor and the taping

operation stops. In this case an operator must put a good device in

the cup and start the taping.

When the taping device count reaches the setting value, carrier tape is

forwarded by the setting number of blank taping and the picker stops

with an alarm.



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(6) Wafer sheet string site 1 set of wafer sheet cassette stores the wafer sheets.

Cassette capacity 25 sheets of wafer sheet

When all the devices on the wafer sheet are sorted, the wafer sheet

returns to the loader table.

After sending the succeeding wafer sheet to the sorting position, the

wafer sheets of which devices have been sorted is rotated 90 degrees

counterclockwise and stored into the cassette.

The wafer sheet is stored at the same position as supply position.

When the sorting of all the devices in the cassette is completed and all

the wafer sheets are returned to the cassette, the picker stops.

(7) Control Section Control section consists of power supply, operation and logic sections.

The picker is operated by personal computer with 12.1 inches LCD

display and several switches. The screens required by maintenance etc.

are protected from the change by password or hidden keys.

Cassette


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3.3 Names and Functions of Components in control site

3.3.1 Operation Switch

(1) START switch

Use the START switch to start the operation of the picker.

The green lamp is ON during the operation.

Before pressing the START switch, check that no potential hazardous situation exists in

and around the picker.

When an alarm situation exists in the picker, the operation does not start by pressing the

START switch.

On pressing the START switch for the first time after turning ON the power supply of

the picker, the movable parts will perform the following initial operations at low speed

(about 20% of high speed).

Start the initial operationMove to the initial check positionMove to the waiting position


The following three functions show that the picker is under initial operation.

The message of initializing in progress appears at upper right on the operation

screen.

All three lamps (green, yellow, red) of the signal tower unit blink.


When it is necessary to access the movable parts by inserting your hands, fingers, or face

into inside the picker, wait until all the movable parts stop completely after the initial

operations. After the picker stops completely, the message of STOP" appears on the

operation screen, and the red lamp of the STOP switch lights up.

NOTICE

NOTICE


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(2) STOP Switch

Use the STOP switch to cease the operation of the picker.

Press this switch during the operation to carry out a cycle stop. The red lamp lights up when the

operation is ceased.

Some mechanical parts may not stop as soon as pressing the STOP switch.

When it is necessary to open the safety cover(s), wait until all the mechanical parts

stop completely.

(3) TEST Switch

During stop condition of the picker operation, the TEST switch function is effective.

When the TEST switch is pressed, a trigger signal for output image of the camera installed at device pick

up section is output to the vision system (optional). This function is used for checking visually the device

conditions.

The orange color switch lamp is lighting during this switch is pressed.

(4) RESET switch

Use the RESET switch to clear an alarm situation.

If an alarm situation is generated in the picker, the operation is ceased and the white lamp is flashing.

Before pressing the RESET switch, read the alarm message on the monitor display to

find the cause, and clear the alarm situation.

If the picker is ceased by plural causes, clear all the causes before pressing the RESET

switch.

To clear an alarm situation in the picker, press RESET switch after conducting safety

checks on the inside and outside the picker.

Do not insert your hands, fingers, or face into the around movable parts when you

press the RESET switch. Doing so may result in serious bodily injury and/or severe

equipment damage.

Some movable parts may move a cycle after pressing the RESET switch.

When it is necessary to access the movable parts, wait until all of them stop completely.

The red lamp of the STOP switch lights up when all movable parts carry out a cycle

stop.

(5) UNLOAD switch

Returns the wafer sheet under sorting or during transportation to the cassette.


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(6) UNLOCK switch

The UNLOCK switch has two functions of releasing the door lock for the device supply site and

releasing the interlocked state.

(a) Pressing the UNLOCK switch can release the door lock provided to the door for the device supply site.

Use the UNLOCK switch to unload the wafer-sheet-containment cassette from the device supply site.

The door of device supply site will not be opened unless pressing this UNLOCK switch.

(b) Pressing the UNLOCK switch can release the interlocked state.

Use the UNLOCK switch to restart the picker when the interlock circuit has been activated.

UNLOCK Switch

Cylinder driven

Door lock lever

Door

NOTICE


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Only when this RING STORE indicator is

lighting, wafer sheet can be manually withdrawn

from the table unit.

Only when this RING LOAD indicator is lighting, wafer

sheet can be manually supplied to the table unit.

Wafer Sheet Take Out Position

Wafer Sheet Supply Position


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(8) SUPPLY switch (on the OPERATION screen)

Supplies the wafer sheet to the sorting position from the cassette or the table unit.

AUTO Mode: Wafer sheets are automatically supplied from the cassette at device supply site.

Press the SUPLLY switch to supply the first wafer sheet. The succeeding wafer

sheets will be supplied automatically.MANU Mode: Wafer sheet is supplied from the table unit. Press this switch each time when the

wafer sheet is supplied manually.

(9) NEW CASSETTE switch (on the OPERATION screen)

Use this NEW CASSETTE switch only when supplying the first wafer sheet from the cassette. The top

one of the piled wafer sheets in the cassette is supplied to the table unit.

If the sorting is suspended by some reason, the wafer sheet is restored into the cassette

before ending the sorting of all the devices and removed the cassette from the picker,

press the SUPPLY switch instead of the NEW CASSETTE switch after setting the

cassette at the device supply site. The suspended wafer sheet will be supplied to the

sorting position and the sorting starts from where it was suspended. In the other words,

the wafer sheet and address of the last sorted device(s) are memorized. By pressing the

SUPPLY switch the picker restarts the sorting of the succeeding device on the

suspended wafer sheet.

(10) Z Mark switch

Not in use.

(11) Arrow Mark switch

During stop condition of the picker operation, the Arrow Mark switch is functionable.

These switches are used for manually shifting the devices on the wafer sheet on the XY table.

Shifting direction of the device is the same direction shown by each arrow mark. Each time when the

arrow mark switch is pressed, devices make one shift towards the direction indicated by the arrow

mark.

NOTICE


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C UTION

3.3.2 EMERGENCY OFF Switch and POWER Switch

(1) EMEREGENCY OFF Switch

Press the red button to stop the picker in an emergency.

Stopping the picker using the EMERGENCY OFF switch turns off the main power to

the picker including the vacuum control mechanism; the air supply switch remains

turned on, though.

After clearing the trouble having necessitated the emergency stop, conduct safety checks

on the inside and outside the picker.

To resume the picker operation, unlock the EMERGENCY OFF switch by giving it

one-quarter rotation in the arrow direction. To restart the picker operation, turn on the

POWER switch (Key Switch) to boot up the personal computer and to activate the

application software, and then restart the picker by pressing the START switch.

In case the EMERGENCY OFF switch is pressed, the EMERGENCY OFF switch

remains pressed.

In case where the EMERGENCY OFF switch is pressed, the picker does not resume

operation when the POWER switch turned on.

EMERGENCY OFF Switch

POWER Switch

NOTICE


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(2) POWER Switch

Use this switch to turn on and off the electric power of the picker.

| : ON

: OFF

- To power ON, insert the key and turn it toward " | " dead-end. When unhanding the key, it returns to " | "position.

- To power OFF, turn the switch to "" position.

The key can be pulled out at either position. Do not remove the key unnecessarily by

other than the responsible personnel of the picker.NOTICE


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C UTION

3.3.3 Personal Computer and Peripheral Equipment

(1) System Units of Personal Computer

CPU :

Main Memory :

HDD :FDD :

CD-ROM :

An uninterruptible power supply (UPS) is installed in the main unit of the personal

computer at the lower portion in the left side of the picker.

Name and type: DC Backup Battery Pack PCPS-RBP-01A

Main Unit of Personal Computer

Main Unit of

Personal Com uter

Replacement Procedure

Loosen the lock screws (2 pcs), and draw out the UPS from

the personal computer.

Replace the UPS and assemble the parts in reverse steps.

Please process the UPS (battery) according to the predetermined

waste disposal method.

When you cannot process, please consult to our company. When

processing is requested to our company, the expense will be charged

separately.

Uninterruptible Power Supply (UPS)

NOTICE


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(2) Keyboard

109-keyboard

(3) Trackball

To be connected to the PS/2 mouse port

(4) SVGA Monitor (800 x 600)

A 12.1 inches LED display is applied.

(5) Bar Code Reader

BL-80V (DOS/V keyboard connecting type of KEYENCE made) is adopted.

The bar code used is CODE39.

Handy Terminal

Bar Code Reader


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(6) Handy Terminal

Fics-RT1 (Dynamics made) is provided.

Use this terminal for the correction of the motor position and also individual movement of motors for

alignment.

(a) OutlineManual operation of a control motor can be performed by the handy terminal.

For operating the loader & main site, connect the handy terminal to the connector installed on the left

side surface. For operating the unloader site, connect the handy terminal to the connector installed on the

right side of the sort bin.

Once the handy terminal is connected to the connector, the motors can be operated by the handy

terminal.When the position of any motor is changed at the time of adjustment, it is necessary to move the position

back under the handy terminal. (Reset the numeric value back to the origin.)

If the numeric value is not reset back, perform the initial operation of the motor, or reboot the 3572-PK

application software.

(b) Operation mode

Initial operation (ORG lights on.)

The mode for carrying out motor initialization

On pressing an axial direction key, initialization operation is performed.

Jog operation (LED lights out.)

The mode for operating a motor for the minimum pulse

In keeping on pressing a key, the motor operates at a uniform interval.

Low speed Scan operation (One LED lights on.

Low-speed uniform move mode

In pressing a key, the motor operates at a uniform velocity.

High speed Scan operation (Two LEDs light on.)

High-speed uniform move mode

In pressing a key, the motor operates at a uniform velocity.

Index operation (Three LEDs light on.)

The mode for operating a motor the set-up amount of movements

In keeping on pressing a key, the motor operates at a uniform interval.

C UTION


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(c) Handy terminal display

1st line (Upper tier) : Group name displayed currently.

2nd line (Middle tier) : Current position coordinates of 1st axis (X) and 2nd axis (Y)

3rd line (Lower tier) : Current position coordinates of 3rd axis (Z) and 4th axis (W)

* It is not displayed when any motor is not set to the corresponding axis.

An example of the display

(d) Key assignment

START : On pressing the switch, the handy terminal becomes effective and the STARTLED lights up.

ORG : On pressing the switch, the mode shifts to the initial operation mode.

The specified motor is initialized by pressing the axial direction key mentioned

below.

MODE : Every time pressing the key, the operation mode changes between-.

X : Leftward movement or initialization on X axis

X: Rightward movement or initialization on X axis

Y : Frontward movement or initialization on Y axis

Y: Backward movement or initialization on Y axis

Z : Downward movement or initialization on Z axis

Z: Upward movement or initialization on Z axis

W : Clockwise rotary movement or initialization on axis

W: Counterclockwise rotary movement or initialization onaxis

: The group is changed to an effective group which is smaller than the current

number.

: The group is changed to an effective group which is larger than the current

number.

0 - 9 : Direct key for changing the group.

< Transfer-A >

X= 0.000 Y= 0.000

Z= 0.000 W= 0.000


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(e) Group assignment

Loader & Main site

Group 0 : Table group

X-axis control of Table, using the X-key

Y-axis control of Table, using the Y-keyNeedle Up (pushing up) axis control, using the Z-key

-axis control of Table, using W key

Group 1 : Transfer-A group

X-axis control of Transfer-A, using the X-key

Z-axis control of Transfer-A, using the Z-key

-axis control of Transfer-A, using the W-key

Group 2 : Transfer-B group

X-axis control of Transfer-B, using the X-key

Z-axis control of Transfer-B, using the Z-key-axis control of Transfer-B, using the W-key

Group 3 : Loader group

Ring Clamper motor control, using the X-key

(CassetteRotary table)

Ring Exchange motor control, using the Y-key

(Rotary tableMain table

Elevator motor control, using the Z-key

Unloader site

Group 0 : Sorting group

X-axis control of Sorting Arm, using the X-key

Y-axis control of Tray, using the Y-key (*In the case of the picker having a Tray

mechanism)

Z-axis control of Sorting Arm, using the Z-key

-axis control of Sorting Arm, using the W-key

Group 1 : Taping 1 group

Pitch motor control, using the Y-key

Seal motor control, using the Z-key

Group 2 : Stick group

Shuttle motor control, using the Y-key

Index motor control, using the W-key

* However, the group configuration is changed according to the specifications of the picker.


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3.3.4 Front panel of Power Supply Unit

Earth Leakage Breaker

Serves as the power switch, which breaks the power circuit of the picker when excessive current or leak

current flows in the power circuit.

| : ON

: OFF

To start the picker operation, turn on the Earth Leakage Breaker first and turn on

the Power Switch.

When the Earth Leakage Breaker activated, return the trip lever to ON position

after clearing the cause.

Handle-Locking Device (Option)

With the handle-locking device, the earth leakage breaker is able to be locked in OFF

position.

NOTICE

NOTICE


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MAIN Indicator (Green)

This indicator lights up when the earth leakage breaker is ON and the power circuit of the picker is

energized.

Hour MeterThe hour meter indicates the uptime of the picker.

5 digits, resettable

Circuit Protector (F1 - F12)

If an over-current occurs in each circuit, the corresponding protector will protrude and power supply to

the circuit will be interrupted.

After clearing the cause, push the protector to the original position. For details of the circuit, refer to the

schematic circuit diagram.

DC 1 Connector

Connects the power supply cable.

PE Terminal

Connects the ground cable.


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3.3.5 Connector Panel of Power Supply Unit

Connects the internal power cables. (Already connected)

The shape, quantity and fixing positions of connectors may vary depending on the specifications of the

picker.

For details, refer to the schematic circuit diagram.


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3.3.6 Taping Controller Panel

Each taping unit is equipped with one TAPING CONTROLLER box , respectively.

(1) SEAL Switch

Deactivates or activates the sealing operation, when the AUTO/MANU

switch in this panel is set to MANU position.

ON (): Deactivates

When this switch is set to OFF, sealing

operation is canceled, and the switch lamp

lights.

OFF (): Activates

(2) WIND UP MOTOR

Deactivates or activates the drive motor for wind-up reel.

ON (): Deactivates (the motor is not energized state)

OFF (): Activates

(3) REEL REPLACE Switch

Is used when exchanging a wind-up reel without stopping the picker

operation.

For details, refer to the following flow diagram;

Taping Controller


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Function of REEL

REPLACE Switch

F.BLANK WITHOUT

SEAL

FRONT BLANK

Taping

REAR BLANK

R.BLANK WITHOUT

SEAL

One sealing action erforms per

passing n embossed cups

Taping stops

Is REEL COUNT preset value ?REEL REPLACE message

appears on OPERATION

STATUS monitor screen

Replace a w ind-up reel

Press REEL REPLACE

sw itch

Alarm message appears

"Number of reel counters

reached to presetnumber"

Press RESET sw itch

REEL COUNT No. is

cleared

NO

YES

Note : The number [n] is specified on the

Taping 1/2 tab in System Configuration

dialog box of Setting menu.


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(4) START switch

Starts the taping operation, when the AUTO/MANU switch in this panel is set to MANU position.

(5) AUTO/MANU Switch

Selects the taping operation mode.MANU() : Independent taping operation only

AUTO () : Automatic taping operation by interacting with the testing

and bin sorting operations.

(6) SUPPLY MOTOR switch

Rotates the supply motor, when the AUTO/MANU switch in this panel is set to MANU position.

While pressing this switch, the tension motor rotates until the supply sensor is ON state, and the switch

lamp lights.

(7) PITCH MOTOR switch

Deactivates or activates the pitch motor.

ON () : Deactivates

When this switch is set to ON, the pitch motor becomes free state, and

the switch lamp lights.

OFF () : Activates

(8) COUNTER RESET switch

Is used to initialize the taping operation status.

This switch is valid while the picker stops in a normal operation.

When this switch is pressed 2 seconds or more, the counts of Reel Capacity for corresponding taping unit

and its memory data are cleared.

At any of the following occasions, the taping operation status must be initialized.

(a) When normal taping operation is disrupted and the carrier tape is to be newly installed.

(b) When the carrier tape is intentionally replaced during a taping operation.


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3.3.7 Air Switch Panel and Air Line Conditioning Equipment

Filter Regulator (AW30-03)

Adjusts the air pressure for the picker and removes particles included in the air.

The secondary pressure is set by turning the adjustment knob.

Clockwise................The secondary pressure increases

Counterclockwise.....The secondary pressure decreases

Mist Separator (AFM30-03)

Removes mist included in the supply air.

Pressure Switch

Detects the low pressure in the air line.

When the pressure in air line drops below the setting value of pressure switch, the picker stops with an

alarm.

By turning the trimmer (Vacuum pressure Trimmer) clockwise, the detection

pressure becomes high.

Adjustment Knob

NOTICE


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AIR Switch

Turns on and off the air supply to the picker.

Pressure Gauge

Indicates the air pressure supplied to the picker.

Air Inlet Port

Connects the air supply tube to the picker.

Air Outlet Port

Connects air tube for air gun etc.


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3.3.8 Others

3.3.8.1 Bar Code Reader

BL-180 Series (KEYENCE) is adopted. Refer to the attached manual in the APPENDIX.

The bar code reader reads the code number printed on the wafer ring after it is transferred to the loader table ,

turned 90 degrees clockwise and lifted up to deliver to the sorting site. If the bar code reader detects any

irregular code number, the picker stops with the error alarm and the below dialog box appears on the display

screen. Select the process on the screen and press the reset switch to clear the alarm.

By inputting the bar code number, the wafer sheet is transferred to the sorting site.

The bar code reader reads the code number printed on the wafer ring again.

The wafer sheet is discharged from the manual loader slot.

The timing to take out the rejected wafer sheet must be according to the indication lamp of the RING

STORE indicator provided on the front of the manual loader door. The wafer sheet can not be taken out

when the RING STORE indicator is not lit up.

Bar Code Reader


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3.3.8.2 Surface Potential Sensor

Once the wafer sheet is transferred to the loader table, turned 90 degrees clockwise and lifted up to the

feeding position to sorting site, the surface potential sensor starts to monitor the level of the static electricity

built up on the surface of the wafer sheet. If the surface potential sensor detects excess electrostatic charge

than the preset value, the picker stops with an alarm. The wafer sheet must be removed from the manual

loader site.

The timing to take out the wafer sheet must be according the indication lamp of the RING STORE indicator

provided on the front of manual loader door. The wafer sheet can be taken out when the RING STORE

indicator lights up.

After taking out the wafer sheet, press the RESET switch to clear the alarm status.

After clearing the alarm status, press the START switch to start the picker operation.

Digital Panel Meter for Surface

Potential Sensor Control

Surface Potential Sensor


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W RNING

3.3.8.3 INTERLOCK Key

Use this switch to turn on and off the interlock function.

ENABLE: Interlock function used mode

When opening any cover, the interlock function performs and interrupts the

motors at corresponding site.

When the interlock function has performed, close all covers and press

the INTERLOCK RESET switch to release the interlock function.

Then, press the START switch to restart the handler operation.

During operation, any cover can not be opened as covers are locked.

DISABLE: Interlock function not used mode

The background of display screen changes in yellow.

When it is necessary to access the movable parts by inserting your

hands, fingers, or face into inside the picker, wait until all the

movable parts stop completely. After the picker stops completely,

the message of STOP" appears on the operation screen, and the

red lamp of the STOP switch lights up.

Especially be careful of pressing the START switch.

On pressing the START switch for the first time after turning ON

the power supply of the picker, the movable parts will perform the

following initial operations at low speed (about 20% of high speed).

Start the initial operationMove to the initial check position

Move to the waiting position

NOTICE


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The message of initializing in progress appears at upper right on

the operation screen.



Make sure that all the movable parts stop completely after the initial

operations.

[Operational Flowchart for Interlock Function]

START

COVER

INERLOCK

RESET SW

START SW

MOTOR POWER ON

Handler START

COVER

MOTOR POWER OFF

ON

OPEN

OFF


ON

OFF

OPEN



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[Applicable Covers and Doors for Interlock Function]

Door L

Door R

Side Cover

Auto Loader

Front Cover


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4-1

Operation

4.1 Preparation for Operation...................................................................................................................4-3

4.2 Operating Procedures ..........................................................................................................................4-7

4.3 Vision Functions..................................................................................................................................4-19

4.3.1 Theta Rough Alignment Function ................................................................................................4-19

4.3.2 Pre Alignment Function.................................................................................................................4-24

4.3.3 Plate alignment...............................................................................................................................4-53

4.3.4 Device alignment function ............................................................................................................4-80

4.3.5 Real time edge frame check function ...........................................................................................4-87

4.3.6 Pocket Visual function...................................................................................................................4-95

4.3.7 Illumination check function.........................................................................................................4-116

4.4 How to Stop Operation.....................................................................................................................4-126

4.4.1 Cycle Stop ................................................................................................................................... 4-126

4.4.2 Emergency Stop.......................................................................................................................... 4-127

4.5 Monitor Display and How to Recover from Error......................................................................4-128

4.5.1 Flow Chart for Starting Handler after Alarm Trouble.............................................................. 4-129


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4. Operation 4-2 200606300T

W RNING

C UTION

Be sure to use fuses which are suitable to the supply voltage and rated current. Confirm that,

when a fuse is exchanged, the supply power is turned OFF and the fuse fits to the rating andtype.

Never use a repaired fuse or shorted fuse holder.

Confirm, before turning ON power supply, that the machine is properly installed, the power

supply is adequate, grounding is properly made, and the fuses fit the supply voltage and rated

current.

Be sure to turn OFF the POWER switch of the machine, before cleaning the parts using

inflammable liquid, for prevention of possible fire or explosion.

Also, ensure that the area is adequately ventilated to remove toxic fume and vapor from the

cleaning liquid.

As general rule, always turn OFF the POWER switch, unplug the power line, and turn OFF air

supply before conducting maintenance work. Only when checking the movement of the

machine while conducting the maintenance work, connect the power line, turn ON the POWERswitch, and turn ON air supply.

Open a protective cover only when it is necessitated for performing the maintenance work.


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4. Operation 4-3 200606300T

C UTION

4.1 Preparation for Operation

Before turning on the main power switch, make sure to confirm that the equipment are

properly fixed, setting of power unit matches to the power supply source, grounding is

made properly and fuse matches to the supply voltage.

After installing the picker by referring to the "2.2.2 Installation", prepare the picker for operation as

follows:

(1) Set up the external equipment including Vision System. For details, refer to the manuals of those

equipments.

(2) Run out or remove all the devices from the picker.

(3) Confirm the type of handling device.

(4) Connect the test head to the picker and confirm Tester I/F.(5) Connect the air supply to the picker and turns on the power switch.

When the picker starts up normally, the below screens appear on the display one after another.

If the below screen does not appear but the desktop screen of Windows 2000, double click the

Icon of 3572PK on the desktop to boot up the control software.

The below screens will appear in order.

Press the INTERLOCK switch which is blinking.

NOTICE


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4. Operation 4-4 200606300T

(6) Press the Start Switch.

The following screen appears and each section starts initialization.

The movable parts perform the following initial operations at low speed (about

20% of high speed).

Start the initial operationMove to the initial check position

Move to the waiting position

NOTICE


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4. Operation 4-5 200606300T

W RNING


The message of initializing in progress appears at upper right on the operation screen.



When it is necessary to access the movable parts by inserting your hands, fingers, or

face into inside the picker, wait until all the movable parts stop completely after the

initial operations. After the picker stops completely, the message of STOP" appears

on the operation screen, and the red lamp of the STOP switch lights up.

(b) The following screen appears when initialization of each section completes.

Specify an operator name and a password for logging in, and press the LOGIN button.


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4. Operation 4-6 200606300T

(7) Open the door of supply section and withdraw the base plate on which the wafer sheet storing cassette is

placed.

(8) Set the wafer sheet storing cassette on the base plate and put it back to the original position.

(9) Close the door of supply site.

(10) The preparation for operation completes by the above. When there is abnormality in the picker or if

there is an operator call, the alarm screen showing the contents and position will be displayed. Take

necessary steps in accordance with the instructions indicated in the alarm message or operation call.

For the details of the alarm message and the operation call, refer to the "4.4 Monitor

Display and How to Recover from Error".

Wafer sheet Storing Cassette

Base Plate

Door

NOTICE


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4. Operation 4-7 200606300T

4.2 Operating Procedures

After completing the preparation for the picker operation by referring to the "4.1 Preparation for

Operation", start to operate the picker as follows:

(1) Set the bulk bin at bin storing position.

(2) Set the taping unit in the following steps. Turn off all the switches on each taping controller unless

otherwise instructed.


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4. Operation 4-8 200606300T

(a) Set the AUTO/MANU switch to MANU, and turn on the PITCH MOTOR switch and the WIND UP

MOTOR switch.

(b) For each taping unit, set the carrier tape reel, the seal tape reel, and the wind-up reel.

Carrier Tape Reel

Reel Clamper

Winding Reel

After setting the carrier tape to the reel,

hold it by the clamper.


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4. Operation 4-9 2006082500T

Seal Tape

Seal Tape Cover

Screw Cap

After setting the seal tape to the reel,

hold it by the clamper.

Seal Tape Reel


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4. Operation 4-10 200606300T

(c) Set the carrier tape as follows:

(i) Set the carrier tape to each pulley as shown in the figure below, and set it to the sprocket by raising theguide roller on the inlet side.

Wind-up Reel Reel Hook

The reel hook must be unhooked (raised) before setting or taking off

the wind-up reel.

After setting/taking off the reel, be sure to hook the reel hook.

Taping Unit

Carrier Tape

Carrier Tape Reel


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4. Operation 4-11 2006082500T

(ii) Insert the carrier tape into the tape loader as shown in the figure above, and set it to the sprocket on the

taping inlet side.

Pulley

Tape Loader

Sprocket (inlet side)Sprocket (outlet side)Rubber Roller


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4. Operation 4-12 2006082500T

(iii) After setting carrier tape to the sprocket on the taping inlet side, turn the handle manually to send the

carrier tape forward. After the carrier tape has arrived at the sprocket on the outlet side, lift the rubber

roller and make the front end of the carrier tape out about 10 cm from the sprocket by manually rotating

the handle.

(iv) Turn OFF the PITCH MOTOR switch.

Rubber Roller

Handle

Sprocket

PITCH MOTOR Switch


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4. Operation 4-13 2006082500T

(v) Set a seal tape to the tension assy and guide roller as shown in the picture below.

Seal Tape Reel

Tension Assy

Guide Roller


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4. Operation 4-15 2006082500T

(6) Set the carrier tape on the wind-up reel as shown in the picture below.

(7) Turn off the WIND UP Motor switch. Then the wind-up reel rotates to wind the carrier tape about the

required quantity and stops the rotation.

(8) Set the AUTO/MANU switch to AUTO.

Carrier Tape

Wind-up Reel

WIND UP MOTOR Switch

AUTO/MANU Switch


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4. Operation 4-16 2006082500T

(9) Perform the setting of each item (parameter). For the details of setting, refer to the Operation Manual

Chapter 5.

This section explains the setting of Lot ID, Device ID and Sort Mode as examples.

(10) Click the OPERATION button. Then, the following dialog box appears.


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4. Operation 4-17 2006082500T

(11) Click the LOT SET button. Then, the following dialog box appears.

(12) Specify the Lot ID, the Device ID and the Sort Mode, and click the OK button.

(13) Press the AUTO button.

When selecting the MANU button, open the door for manual

supply and set a wafer sheet at the lower lane of table unit.

After checking the indication light at the front of door, press

the SUPPLY button to supply the wafer sheet.

NOTICE


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4. Operation 4-18 2006082500T

NEW CASSETTE Switch

SUPPLY Switch

(14) Press the blinking NEW CASSETTE switch, then press the SUPPLY switch.

Use the NEW CASSETTE switch only when loading the wafer sheets automatically

from the first top of the piled wafer sheets in the cassette at device supply site.

If the sorting is suspended by some reason and the wafer sheet is restored into thecassette before ending the sorting of all the devices, press the SUPPLY switch. The

restored wafer sheet is loaded again to the sorting site and the sorting starts from where it

was suspended.

(15) Press the START switch. The following screen appears and the picker starts loading of wafer ring.

NOTICE


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4. Operation 4-19 2006082500T

(16) When a wafer sheet is transferred to the sorting site, in accordance with the Map File

Data (each alignment data and test result data for sorting) supplied by the picker, the picker starts

sorting.

(17) When the sorting of the first wafer sheet completes, the first wafer sheet is replaced with the secondwafer sheet. After the replacing, the sorting of a second wafer sheet starts. Repeating those actions, the

picker sorts the devices on wafer sheets in the cassette successively.

(18) When the sorting of all the devices on every wafer sheet in the cassette completes, the picker stops by

lot end. The NEW CASSETTE switch starts blinking and an alarm sounds.


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4. Operation 4-20 2006082500T

4.3 Vision Functions

4.3.1 Theta Rough Alignment Function

4.3.1.1 Outline

This function supports model image registration (Pre Align 1, 2, 3, 4 and Top, Right, Left, Bottom) which is

performed in camera1 when a new device parameter is created. Normally, at the time of model imageregistration for PreAlign1,2,3, 4, and Top, Right, Left, Bottom, after correcting a plate inclination using a

handy terminal, it must register, but since this function corrects automatically before registration, it becomes

easy to register.

4.3.1.2 Necessary condition

If the following two conditions are applicable, this function is performed automatically.

Condition 1 Pre Alignment is enabled.

[Operation menuSettingControl ModeFunction Setting / Main Common]

Fig1

Refer to the PreAlignment_English.doc for the detail of function.

Condition 2 There are some which are not registered at least one of eight model

images (PreAlign1,2,3,4 and Top, Right, Left, Bottom).

Pre Alignment Function


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4. Operation 4-21 2006082500T

4.3.1.3 Flow

Please advance as the following procedures.

(1) Model registration

First, because the following alarm occurs, register a model image, please. At this point, because the machinestops at the first corner of plate, register a model image of the first corner device.

a. Alarm occurs (No Model Registration for Theta Rough Align). (Fig2)

Fig 2


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4. Operation 4-22 2006082500T

b. Set the window so that the first corner device is surrounded. (Fig3)

Fig 3

c. Set the origin to the center of the first corner device. (Fig4)

Fig 4

Window setting

Origin setting


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4. Operation 4-23 2006082500T

d. Push Model Regi. and register a model image.

Because this model image is used temporarily, it is not saved at a file.

The position of first corner.

The following figure 5 shows a corner device.

Fig 5

(2) Start the machine.

After model registration, press Start button of machine, please. As shown by Fig 5, the

machine moves in order of 1st, 2nd, 3rd, and 4th corner, when two searches of a device are

successful, angle correction is performed and it shifts to the next process

(Refer to the PreAlignment_English.doc about next action).


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4.3.1.4 Alarm

If the corner device is not found in two or more places, alarm occurs. (Theta Rough Check Error! Please

Check Theta Rough Image from Vision View) (Fig6). Prepare a ring which have four corner devices and try

again.

Fig 6


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4. Operation 4-25 2006082500T

4.3.2 Pre Alignment Function

4.3.2.1 Outline

This function searches a plate corner position by using an edge frame of the periphery part of a plate and

calculates an exact plate attachment position. This function corrects a plate inclination and protects a

mis-sorting.

4.3.2.2 Parameter

The parameter used by this function is as follows.

(1) Enable or Disable setting.Fig

[MenuSettingControl Mode SettingSelectionFunction Setting / Main Common]

Fig


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4. Operation 4-26 2006082500T

(2) Corner device position setting. (Fig2)

In order to perform a proper movement, it is necessary to set a parameter in Fig 2. The

machine uses this position data and goes to search a plate corner.

[MenuSettingProductSelectionPackage Param]

Number of Reference Mark Input the number of corner. Normally, it is 4.

Ref1, Ref2, Ref3, Ref4 Input the relative corner position from the first corner

position.

Fig

Corner device position parameter for

Pre Alignment


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The relation of each corner is as follows. (Fig3, Fig4)

Fig

The case which the ring direction is not 0 degree.

In case of 180 degree.

Fig


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4. Operation 4-28 2006082500T

(3) Brightness setting

Input a LED brightness setting for Pre Alignment.Fig

[MenuSettingProductSelectionVision Standard]

Camera 1 Light Brightness This is for device. Normally, this is used. If a device andan edge frame can be seen by same brightness setting,

this is used.

Different Brightness For Edge Frame If the edge frame can not be seen by same

brightness setting as device alignment, this is

used.

Fig5

For device For edge frame


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(4) Search Score Setting

There are two score settings for search.

The score shared between all device parametersFig

The setting in this dialog is common to all device parameters.[MenuMaintenanceConfigurationSystemVisual Config]

Reference Mark Score

Fig

Search score for edge frame


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Individual Score(Fig

In order to set for each device parameter, it sets in the following dialog.

[MenuSettingProductSelectionVision Standard]

Ref Search Score

Fig

Individual score for edge frame


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4. Operation 4-31 2006082500T

4.3.2.3 Flow

The flow of this function is as follows. Please advance as the following procedures. Because model

registration is performed first, please prepare a wafer ring with an edge frame and a corner device.

(1) The first corner ( Reference Mark Position 1 (Top Right) )(a) Model registration of Pre Alignment1

A new device parameter is created, if this function is enabled, alarm occurs, and the machine stops at the first

corner.

Alarm occursNo Model Registration for Reference Mark Check.Fig

Fig


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Model registration

Register the first corner edge frame as a model image.Fig

Fig9

Push Model Regi button and register.

Camera

Pre Alignment 1Set the window so that

the corner edge frame

is surrounded.

Set the origin to the

center of corner device.

Layout of an edge

frame is shown.


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The cautions at the time of registration

When model registration is performed in PreAlignment 1, 2, 3, and 4 , if many features

are found on an image , a message as shown in Fig10 comes out. In this case, because

registration is not completed, please register again.

Fig

Press Start button.

After registration is completed, start the machine. The machine performs the next action.

Real time edge frame check is enabled. Model registration of Top Edge (Page 11)

Real time edge frame check is disabled. Model registration of Pre Alignment2

(Page 15)

Refer to the RealTimeEdgeFrameCheck_English.doc for the detail of Real time edge frame

check function.

In this case, this message comes out.

Many features are found.


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(b) Model registration of Top Edge

If there is no model image, alarm occurs. The machine stops at the first corner.

Alarm occurs.No Model Registration for Edge Frame Check (Top Edge Frame). (Fig11

Fig


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Model registration.

Register the top edge frame as a model image.Fig

Fig12


Press Start button.

After registration is completed, start the machine. The machine performs the next action (Model

registration of Right Edge).

Camera

Top - Edge

Set the window so that the top edge

frame is surrounded.

Set the origin to the center

of device next to setting

window.

Layout of an edgeframe is shown.


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(c) Model registration of Right Edge

If there is no model image, alarm occurs. The machine stops at the first corner.

Alarm occurs.No Model Registration for Edge Frame Check (Right Edge Frame)Fig13

Fig3


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Model registration

Register the right edge frame as a model image.Fig

Fig1


Press Start button.


registration of Pre Alignment 2).

Camera

Right - Edge

Set the window so that the

right edge frame is

surrounded.



window.

Layout of an edge

frame is shown.


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(2) The second corner ( Reference Mark Position 2 (Top Left) )

(a) Model registration of Pre Alignment2

If there is no model image, alarm occurs. The machine stops at the second corner.

Alarm occurs.No Model Registration for Reference Mark Check.Fig

Fig


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Model registration

Register the second corner edge frame as a model image. (Fig 16)

Fig



The same as PreAlignment1, When model registration is performed, if many features

are found on an image , a message as shown in Fig10 comes out. In this case, because registration

is not completed, please register again.

Press Start button.


Real time edge frame check is enabled. Model registration of Left Edge (Page 17)

Real time edge frame check is disabled. Model registration of Pre Alignment3

(Page 19)

Refer to the RealTimeEdgeFrameCheck_English.doc for the detail of Real time edge frame

check function.

CameraPre Alignment


corner edge frame is

surrounded.

Set the origin to the

center of corner device.

Layout of an edge

frame is shown.


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(b) Model registration of Left-Edge

If there is no model image, alarm occurs. The machine stops at the second corner.

Alarm occurs.No Model Registration for Edge Frame Check (Left Edge Frame)(Fig17)

Fig


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Model registration

Register the left edge frame as a model image.Fig8

Fig1


Press Start button.


registration of Pre Alignment 3).

Camera

Left - Edge


left edge frame is

surrounded.



window.

Layout of an edge

frame is shown.


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(3) The third corner ( Reference Mark Position 3 (Bottom Left) )

(a) Model registration of Pre Alignment3

If there is no model image, alarm occurs. The machine stops at the third corner.

Alarm occurs.No Model Registration for Reference Mark Check. (Fig

Fig

9


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Model registration

Register the third corner edge frame as a model image. (Fig 20)

Fig 20



The same as PreAlignment1, 2, when model registration is performed, if many

features are found on an image, a message as shown in Fig10 comes out. In this

case, because registration is not completed, please register again.

Press Start button.


Real time edge frame check is enabled.Model registration of Bottom Edge (Page 21)

Real time edge frame check is disabled.Model registration of Pre Alignment4

(Page 23)

Refer to the RealTimeEdgeFrameCheck_English.doc for the deta

1. 3572-pk sno.28 instruction manual

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