04 semiconductor in equilibrium

77
Department of Microelectronics and Computer Engineering 23/09/08 1 Chapter 4 The Semiconductor in Equilibrium

Upload: tu-delft-opencourseware

Post on 25-May-2015

2.568 views

Category:

Education


3 download

TRANSCRIPT

Page 1: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 1

Chapter 4

The Semiconductor in Equilibrium

Page 2: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 2

Topics

• Thermal-equilibrium concentration of electron and holes• Intrinsic carrier concentration• Intrinsic Fermi-level position• Dopant atoms and energy levels• Extrinsic carrier concentration and temperature dependence• Ionization energy of dopant atoms in silicon• Fermi level in extrinsic semiconductor• Degenerate semiconductors• Fermi level in two systems in contact with each other and

at thermal equilibrium.

Page 3: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 3

Why?• Current is determined by flow rate and density of

charge carriers. • The density of electron and holes are related to the

density of states function and the Fermi distribution (or probability) function.

Page 4: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 4

Conduction band

Valence band

Page 5: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 5

Density of quantum states per unit volume at energy E

For conduction band

For valence band

Density of states

*

Page 6: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

The probability that a quantum state at an energy E will be occupied by an electron

The ratio between filled and total quantum states at any energy E

Fermi-Dirac distribution (or probability) function

6

Page 7: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 7

Fermi-Dirac distribution (or probability) function

Page 8: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 8

Distribution of electron and holes

n ( E ) = g c ( E ) f F ( E )

p ( E ) = g v ( E ) 1 − f F ( E )[ ]

Number of electrons at E(in conduction band)

Density of states at E Fermi-Dirac probability function

Number of holes at E (in valence band)

Page 9: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

conduction band

9

valence band

Page 10: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 10

Electron concentration

n 0 = D e n s i t y o f s t a t e s ∗ P r o b a b i l i t y f u n c t i o n d EB o t t o m o f c o n d u c t i o n b a n d

T o p o f c o n d u c t i o n b a n d

EC

The equation is valid for both intrinsic and extrinsic semiconductors

Page 11: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08September/Oktober 2004

Condition:E - EF >> kT

Boltzman approximation

11

Page 12: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 12

Comparison of Fermi-Dirac probability function and Maxwell-Boltzmann approximation

3kT

Maxwell-Boltzmann approximation and Fermi-Dirac function are within 5% of each other when E-EF 3KT≥

Page 13: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

n0

Gamma function:

1

13

Page 14: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Nc= effective density of states function in the conduction band

The equation is valid for both intrinsic and extrinsic semiconductors

14

Page 15: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Hole concentration

15

Page 16: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Nv= effective density of states function in the valence band

16

Page 17: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 17

Nc(cm-3) Nv(cm-3) mn*/m0 mp*/m0

Si 2.8 x 1019 1.04 x 1019 1.08 0.56

Gallium Arsenide 4.7 x 1017 7.0 x 1018 0.067 0.48

Germanium 1.04 x 1019 6.0 x 1018 0.55 0.37

Effective density of states function and effective mass values

Page 18: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 18

Intrinsic semiconductor

• Intrinsic electron concentration = Intrinsic hole concentration

n i = p i

Intrinsic carrier concentration

Why?

• charge carriers due to thermal excitation• thermally generated electrons and holes always created in pairs.

Page 19: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

INTRINSIC SemiconductorIntrinsic Fermi level

Intrinsic carrier concentration

19

Page 20: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 20

Semiconductor Ni

Silicon 1.5 x 1010 cm-3

Gallium Arsenide 1.8 x 106 cm-3

Germanium 2.4 x 1013 cm-3

Commonly accepted values of ni at T=300K

Page 21: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 21

ekTE

NNn gvci 101010 log

2)(log

21)(log −=

Plot of log10(ni) vs. 1/T is straight line.

Slope is negative. From the slope Eg can be calculated

Page 22: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 22

Application of the intrinsic semiconductors

• High Electron Mobility Transistor

• High resistivity substrate for RF circuits

• amorphous-Si Solar Cells

Structure of solar cell

Page 23: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 23

Conduction band

Valence band

Where is the intrinsic Fermi level?

EFi (Intrinsic Fermi level): EF at which electron and hole concentration becomes equal

Page 24: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 24

Even in intrinsic semiconductor, Fermi level is not exactly at centre between conduction and valence bands.

Electron concentration Hole concentration

Page 25: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 25

Page 26: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Intrinsic silicon lattice

26

Page 27: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Acceptor and Donor Impurities:

• In Si four electrons in the valence shell participate in bonding.• atom with more than 4 valence electrons donor impurity• less than 4 acceptor impurity.

27

Page 28: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Silicon lattice doped with donor impurity

Donor Impurity:

• At very low temperature, the donor (excess) electron is still bound to the impurity atom.• However, the donor electron is loosely bound to the impurity atom and can become free with small amount of thermal energy. Impurity atom is then ionized and positively charged.

28

Sb

Page 29: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

• little energy required to move donor electrons from donor states to conduction band.• positively charged donor ions are fixed but donor electrons in the conduction band can move through the crystal.

Donor electron energy level:

29

Page 30: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Acceptor Impurity:

• One covalent bond is incomplete for Si.• With little thermal energy, a valence electron can break from another covalent bond and can occupy this position, thus creating a hole at the location of the broken covalent bond.• The acceptor impurity is then ionized and negatively charged.

30

Page 31: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Acceptor Energy Level:

• little energy required to move valence electrons to acceptor levels.• negatively charged acceptor ions are fixed but holes in the valence band can move through the crystal.

31

Page 32: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 32

Electron concentration vs. temperature showing partial ionization, extrinsic and intrinsic regions.

Electron concentration vs. temperature in n-type semiconductor

Page 33: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 33

Electron concentration vs. temperature in extrinsic semiconductor

• At low temperatures, donor impurities are partially ionized. As temperature increases the percentage of ionized donor impurities also increases

• Once all donor impurities are ionized, there is no increase in carrier concentration. Even though intrinsic carrier concentration continues to increase, it is still small compared to extrinsic concentration.

•At high temperatures, intrinsic carrier concentration dominates and electron concentration continues to increase again.

Page 34: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

The ionization energy is the energy necessary to remove an electron from the neutral atom.

In case of donor atoms, the ionization energy is the energy necessary to elevate an electron from the donor level to conduction band.

Ionization energy:

34

Page 35: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

• In the next few slides, we will calculate the approximate ionization energy for donor atoms.

•We use Bohr atomic model for these calculations. For hydrogen atom, Bohr model and quantum mechanics give similar results.

•Donor impurity atom can be visualized as one donor electron orbiting the positively charged donor ion. This condition is similar to that in a hydrogen atom.

•However we have to consider permittivity of silicon instead of permittivity of free space.

Ionization energy:

35

Page 36: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 36

Angular Momentum Quantization

• Bohr proposed that circumference of electron orbit = integer number of wavelengths

36

Then angular momentum,

angular momentum of electron is quantized.

Page 37: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Ionization energy calculation:

Centripetal forceCoulomb attraction force

Angular momentum quantization

37

Page 38: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

As defined in Chapter 2, Bohr radius =

26.0m

*m and 7.11

silicon,For

0

==rε For n=1,

38

=radiusBohr

radiuselectron orbiting

Page 39: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 39

• r1/a0=45 or r1=23.9A0

• This radius ~ 4 lattice constants of Si.

• Each unit cell contains 8 silicon atoms.

• Donor electron thus loosely bound to the donor atom.

• We will next find the approximate ionization energy.

Page 40: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Total energy

40

Kinetic energy Potential energy

( refer slide 37)

Page 41: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 41

• Ionisation energy of Hydrogen in lowest energy state = -13.6eV

• For Si, it is -25.8meV << band gap.

• Calculations using Bohr model give only the order of magnitude of the

ionisation energy. Actual values differ.

Impurity Ionization energy (eV)

Si Ge

Donors

Phosphorus 0.045 0.012

Arsenic 0.05 0.0127

Acceptors

Boron 0.045 0.0104

Aluminum 0.06 0.0102

Impurity ionization energies in Silicon and Germanium

Impurity Ionization energy (eV)

Donors

Selenium 0.0059

Tellurium 0.0058

Silicon 0.0058

Germanium 0.0061

Acceptors

Beryllium 0.028

Zinc 0.0307

Cadmium 0.0347

Silicon 0.0345

Germanium 0.0404

Impurity ionization energies in gallium arsenide

Page 42: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 42

EXTRINSIC Semiconductor

n-TYPE p-TYPE

Majority carrier electrons

Minority carrier holes

Majority carrier holes

Minority carrier electrons

Page 43: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

The equation is valid for both intrinsic and extrinsic semiconductors

43

Page 44: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 44

Another form (relation between EF and EFi)Intrinsic carrier concentration

n0p0=ni2

Page 45: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 45

Where is the Fermi level?

Page 46: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 46

Condition for the Boltzmann approximation

EC-EF > 3KT

Page 47: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 47

Use The Fermi-Dirac Integral

No Boltzmann approximation

If the impurity concentration is very high....

Fermi level will be very close to conduction band or valence band.

Page 48: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Boltzman approximation

Only if EC-EF > 3KT

48

Page 49: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 49

Fermi-Dirac Integral

If ηF>1, then EF>EC

Page 50: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 50

Degenerate Semiconductors

Page 51: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 51

If the impurity atoms are very close each other...

• Donor electrons interact with each other• The single discrete donor energy will split into a band• The band may overlap the conduction band• If the concentration exceed Nc, EF lies within the

conduction band

Page 52: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Nd > Nc Na > Nv

Degenerated Semiconductor

Fermi level in the conduction band: Metallic conduction

52

Page 53: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 53

Statistics of donors and acceptors

Page 54: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 54

How many electrons still in the donor levels compared to the total number of electrons?

depends on the temperature and the Fermi level....

Page 55: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Probability function for donor & acceptor levels

This same as the Fermi-Dirac probability function except the pre-exponential coefficient of ½.

Density of donor atoms

Density of electrons occupying donor states

Concentration of ionized donors

55

Page 56: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 56

similar for holes:

g=degeneration factor; 4 for GaAs and Si acceptor levels

Page 57: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 57

Low temperature Moderate temperature High temperature

Page 58: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Ed-EF>>kT

Moderate temperature

If Ed-EF >> kT, then even Ec-EF >> KT

58

Then,

Page 59: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

With Phosphorus doping of Nd=1016cm-3, at T=300K, nd/(nd+n0)=0.41%

Almost complete ionization at Room Temp!

Fraction of electrons still in the donor states

59

Page 60: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Extremely low temperature (T=0K)

nd=Nd

EF > Ed

Freeze-out

60

Page 61: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 61

High temperature

• At very high temperature behavior is just like the intrinsic semiconductor

(because of thermally generated electrons)

(because of thermally generated holes)

Page 62: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Complete ionization

Freeze-out

62

Page 63: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 63

Compensated semiconductor

• Both donor and acceptor impurities in the same region

• If Nd > Na n-type compensated semiconductor

• If Nd < Na p-type compensated semiconductor

• If Nd = Na completely compensated (will behave like

intrinsic material)

• Practical semiconductor is always compensated semiconductor.

Eg. Substrate is predoped usually p-type. All other dopings are done on top

of this.

Page 64: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 64

Charge neutrality :

Ionized acceptors

Ionized donors

Page 65: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 65

Using the relation

n0 is not simply Nd

Recall

Page 66: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 66

Minority carrier concentration

p 0 =n i

2

n 0

Similarly in p-type semiconductor,

22

0 22 idada nNNNNp +

−+−=

(n-type material)

o

i

pnn

2

0 =

(p-type material)

Page 67: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 67

Page 68: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Where is the Fermi level of an extrinsic semiconductor?

N-type: Nd>>ni then n0≈Nd

68

Page 69: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Where is the Fermi level of a p-type extrinsic semiconductor?

P-type: Na>>ni then p0≈Na

=−

a

vvF N

NkTEE ln

69

Page 70: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Position of Fermi level for an (a) n-type and (b) p-type semicondcutor.

(a) (b)

70

Page 71: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 71

Different expression for the n-type...

Another expression for the p-type

E F i − E F = k T l np 0

n i

Page 72: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Variation of EF with doping concentration:

72

Page 73: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08 73

Variation of EF with temperature T

E F i − E F = k T l np 0

n i

=−

iFiF n

nkTEE 0ln

Variation of Fermi level with temperature for different doping concentrations

• At higher temperatures, the semiconductor becomes more

intrinsic. ni increases and Fermi level moves towards mid-gap

•At T=0, Fermi level is above Ed in n-type and below Ea in p-type semiconductor

Page 74: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

EF must be equal when different systems are in contact and in thermodynamic equilibrium

Consider a material A, with Fermi level EFA. Bands below EFA are full and above are empty.

material B with Fermi level EFB.

74

Page 75: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

EF must be equal when different systems are in contact and in thermodynamic equilibrium

• When A and B are brought in contact, electrons will flow from A into lower energy states of B, until thermal equilibrium is reached.

• Thermal equilibrium EF same in A & B

75

Page 76: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Summary• Electron concentration

• Hole concentration

• Intrinsic carrier concentration :

• In intrinsic semiconductor, Fermi level is close to but not exactly in the centre between conduction and valence bands.

76

0( )exp c F

cE En NkT− = −

0( )exp F v

vE Ep NkT

− =

20 0

( )exp exp gc vi c v c v

EE En n p N N N NkT kT

− = = − = −

Holds for both intrinsic as well as extrinsic semiconductor

*

*

3 ln4

pFi midgap

n

mE E kT

m

− =

Page 77: 04 Semiconductor in equilibrium

Department of Microelectronics and Computer Engineering

23/09/08

Summary• In extrinsic semiconductor, Fermi level is close to conduction

band (n-type) or valence band (p-type)

• Position of Fermi level in extrinsic semiconductor

• In compensated n-type semiconductor electron concentration is given by

• When two different systems are in contact and in thermal equilibrium, EF must be the same in both systems.

77

0lnF Fii

nE E kTn

− =

22

0 2 2d a d a

iN N N Nn n− − = + +