04 - members bios expertise sep 2015
TRANSCRIPT
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9/18/2015© 2014 88 Equipment
Equipment Engineering and Process Consulting
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© 2014 88 Equipment 9/18/2015 2CONFIDENTIAL
Member Biographies
Peter J. Nowosad - President 20+ yrs. experience in project and customer support management WW
Broad semiconductor and equipment background
Engineering design for high-tech chemical/gas distribution systems
Knowledgeable in Diffusion, CVD, ALD, PVD, and Etch
Based and living in Taiwan since 2000
Todd O. Curtis - V.P. and Chief Technical Officer 40 yrs. experience in III-V and Silicon: CVD/ALD processing and integration R&D with IBM, Intel, TI, Motorola, SEMATECH, SELETE Japan, TSMC, ST… Semi-Materials R&D Apps. Lab Mngr: equip, metro, staff, training, facilities… Over 25 articles: CVD & ALD, silicon and III-V materials, device integration Technology consultant to the 22nm node, selective deposition patent
Dr. Len Mei - Key Advisor Intn’l Business and Technology Professor at the University of Campinas, Brazil and visiting Research Associate Professor at Stanford University Electronics Lab 30+ years experience including Fab Director and EVP of Operations /
Business Dev for major Semi companies such as ProMOS, Fairchild, etc
20+ patents in semiconductor technology and Published Author of
"Practices of Wafer Fab Operations“.
Michel D. Ouaknine - EU Operations & Technology
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© 2014 88 Equipment 9/18/2015 3CONFIDENTIAL
Peter J. NowosadCompanies-Positions-Sites Supported
BA from Michigan Tech 1994
Silicon Systems / Texas Instruments
1995-1997
Thin Film Maint
Novellus Systems 1997-1999
Field Service Eng
WJ / SVG / ASML / Aviza
1999-2009
Final Test Technician - WJ
Field Service “WJ Hot Shot” Team
Asia Tech Support Manager
Fab-Finder, Inc
2009-2014
2011-Current High Tech Equip.
Consulting
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© 2014 88 Equipment 9/18/2015 4CONFIDENTIAL
Todd O. Curtis Companies-Position-R&D Sites
Technicon 1971 Electrician
Hewlett-Packard 1973-1978
LED Epi & Xtal Growth Ops.
Siemens Opto 1978-1979
GaAsP Epi R&D
Fairchild Opto 1979-1982
LPE, MOCVD III-V EPI R&D
Avantek GaAs 1982-1983
Military GaAs Epi & Implant
Dexcel-Gould 1983-1986
Military GaAs AsCl3 Epi & Dev.
Si-Fab 1986-1988 Silicon Fab Equipment
WJ Microwave 1988-89 Military
III-V MBE
WJ Semi. Equip. 1989-2000
APCVD, MOCVD Apps. Lab R&D
ASML Thermal 2000-2003
ALD, APCVD, MOCVD R&D
Consulting 03-06
Genus-Aixtron 2006-2007
ALD R&D CVD W
2007-Current Used Equip. Technical Consulting
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© 2014 88 Equipment 9/18/2015 5CONFIDENTIAL
Todd O. Curtis: Expanded Bio
Todd started his semiconductor career in 1973 at the Hewlett-Packard Opto-Electronics Division in Palo Alto California. He spent the next 15 years in L.E.D. and MESFET III-V materials production and development epitaxial operations at such notable companies as Siemens, Fairchild, Avantek, Gould-Dexcel, and Watkins-Johnson Microwave Group.
In 1989 he began his silicon materials career in Watkins-Johnson Semiconductor Products Division in Scotts Valley California at the cusp of the industry evolution from 150mm to 200mm wafers. Todd spent the next 15 years with Watkins-Johnson in equipment and process engineering working in production and R&D device and materials operations. Todd worked with and co-published technical papers with companies world-wide including INTEL, TSMC, UMC, Texas Instruments, ST Microelectronics, Motorola, IBM, Chartered, Samsung, Sematech, SMIC, Toshiba, Sony, and NEC.
His process development work in the early 1990’s on STI (shallow trench isolation), ILD (inter-level dielectrics) and IMD (inter-metal dielectrics) became mainstream production processes used in over 80% of the semiconductor factories world-wide. His last R&D project was at the 22 nano-meter technology node for ALD (atomic layer deposition) for high-K gate dielectrics and ALD tunable work-function metal gates.
His 40+ years of materials research and production experience includes III-V's for L.E.D. and MESFET's, and over 30 types of silicon related oxides, nitrides, and metals utilized in front-end and back-end applications.
He has been an independent technology consultant since 2003 for equipment and process in the fields of semiconductor, solar, and LED operations. He has lived in Taiwan since the year 2000 and travels frequently to Vietnam in support of his current projects.
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© 2014 88 Equipment 9/18/2015
GaAs ~ III-VProcess, Materials, Device, Equip.
CONFIDENTIAL 6
Hewlett-Packard 1973-1978
Epi & Xtal Growth GaAs, GaAsP, GaP
Siemens Opto 1978-1979
GaAsP VPE Epi R&D
Fairchild Opto 1979-1982
LPE, MOCVD III-V EPI R&D
Ternary & Quaternary
Avantek Microwave 1982-1983
Military GaAs VPE Epi & Implant
Dexcel-Gould 1983-1986
Military GaAs AsCl3, MBE Epi & Device Process
WJ Microwave 1988-89 Military
III-V MBE
Genus-Aixtron 2006-2007
ALD & EPI R&D MOCVD
Over 15 yrs. of III-V Experience
Process Materials Device Equipment
AVANTEK
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© 2014 88 Equipment 9/18/2015
GaAs ~ III-VProcess, Materials, Device, Equip.
CONFIDENTIAL 7
Process
Epitaxy
MBE-MOCVD
LPE-VPE
Cl3 & AsCl3
Solid and Semi Solid Sources
Materials
GaAs
GaAsP
GaP
AlGaAs
InAlGaAs
P or N Doped
Device
L.E.D.
MESFETS
Lo-noise Power
T and Y-gates Air Bridges
HEMT-Quad-Layers
Equip.
Reactors
Metals
Metrology
Parametric Test
Cleans
All Types
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© 2014 88 Equipment 9/18/2015 8CONFIDENTIAL
Dr. Len Mei joins 88 Equipment as Key Advisor for International Business and Technology
Feb 15
Dating back to the early 1980’s, Dr. Mei has been at the forefront of advanced semiconductor development and manufacturing on an International scale with over 30+ years of academic and industrial experience in semiconductors. Fab director at Read-Rite California, managing thin film disk head fab ops and dev. Process manager at Fairchild Semiconductor for advanced memories . Process manager at Data General for microprocessor development and pilot line. Director of planning at Elebra, designing the first 8” advanced wafer for Brazil in 1987.
In academics, he has been a professor at the University of Campinas, Brazil and a visiting Research Associate Professor at Stanford Electronics Lab, Department of EE - Stanford University.
From 1997-2009: EVP of Operations and Business Development for ProMOS Technologies - responsible for all
aspects of ProMOS manufacturing operations including four front end wafer fabs with total capacity exceeding 80K/month 12” wafers and back end operation, product engineering, strategic planning, automation for equipment, factory and data. He managed up to 4,000 head-count and 65 nm technology in volume production with annual capex exceeding $1 billion.
After 2006, Dr. Mei became responsible for new technology and business development at ProMOS. In this capacity, he founded CapsoVision, a company dedicated for the research and production of
capsule camera for medical applications. CapsoVision’s device is pending on FDA approval in
2015.
Dr. Mei holds more than 20 US international patents in semiconductor technology and is the author of the book "Practices of Wafer Fab Operations“.
He received his Ph.D. in Metallurgy from University of Illinois at Urbana-Champaign, USA.
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© 2014 88 Equipment 9/18/2015 9CONFIDENTIAL
Michel D. Ouaknine Companies-Position
Dyna Electronique 1972-1974
Design Mngr.
Intel 1974-1977
Apps. Engineer
Intersil1977-1982
Applications Manager
Zilog 1982-1983
Applications Manager
Western Digital 1984-1990
Managing Director
Genus Inc. 1992-1996
Europe Director of Operations
Mattson Technology 1996-2001
RTP Sales Manager
WaferMasters2001-2004
Europe Operations Manager
EU Operations & Technology Consultant
2004 to current